3.2.1 Focus Effects and Process Window
Experimental values of and D F vs exposure dose for negative tone epoxy... | Download Scientific Diagram
a). Average develop ment rates versus exposure dose for ascending... | Download Scientific Diagram
Grayscale e-beam lithography: Effects of a delayed development for well-controlled 3D patterning - ScienceDirect
1a:Thickness-dose characteristic of standard i-line photoresist (film... | Download Scientific Diagram
Lithography
Exposure of Photoresists
Influence of exposure dose on achievable channel width for different... | Download Scientific Diagram
Quantitative analysis and modeling of line edge roughness in near-field lithography: toward high pattern quality in nanofabrication
20: (SEM micrographs) Conventional order hybrid lithography result... | Download Scientific Diagram
Exposure of Photoresists
Understanding dose correction for high-resolution 50 kV electron-beam lithography on thick resist layers - ScienceDirect
Simulation result of dose modulation. With decreasing exposure dose,... | Download Scientific Diagram
Process study and the lithographic performance of commercially available silsesquioxane based electron sensitive resist Medusa 82 - ScienceDirect
Resist-Wiki: CSAR 62 für EUV-Anwendungen - Allresist DE
Independent-Exposure Method in Electron-Beam Lithography | IntechOpen
Ratio resolution and dose exemplarily shown for e-beam resist SX AR-N 7530/1
UniLOR® N Single-layer Lift-off Photoresists | Kayaku Advanced Materials, Inc.
The relation between the photoresist film thickness after the... | Download Scientific Diagram
Lithography
A comparative study of resists and lithographic tools using the Lumped Parameter Model
Resist-Wiki: Interferenzlithographie - Allresist DE
9. How are photo resists exposed, and how can the optimum exposure dose be determined? How long can coated and exposed substrates be stored prior to exposure? - Allresist EN
The relation between the photoresist film thickness after multiple dose... | Download Scientific Diagram
Chris A. Mack, Fundamental Principles of Optical Lithography, (c) ppt video online download
